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Journal: Sensors, 2008
Volume: 8
Page(s): 994-1003
994-1003
Article: A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS
Boutaayamou, M.; Sabariego, R.V.; Dular, P.

http://www.mdpi.com/1424-8220/8/2/994

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