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Journal: Sensors, 2008
Volume: 8
Page(s): 767-783
767-783
Article: Experimental-Numerical Comparison of the Cantilever MEMS Frequency Shift in presence of a Residual Stress Gradient
Ballestra, A.; Somà, A.; Pavanello, R.

http://www.mdpi.com/1424-8220/8/2/767

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