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Sensors 2006, 6(5), 503-513; doi:10.3390/s6050503

Article

CNT Sensors for Detecting Gases with Low Adsorption Energy by Ionization

Seongjeen Kim

Department of Electronic Engineering, Kyungnam University, Masan, Korea 631-701

Received: 29 March 2006 / Accepted: 4 May 2006 / Published: 5 May 2006

(This article belongs to the Special Issue Gas Sensors)

Download PDF Full-Text [119 KB, uploaded 20 June 2008 16:51 CEST]

Abstract: In case of typical chemical gas sensors reacted by gas adsorption on surface of anactive layer, it is difficult to detect some gases which have low chemical adsorption energylike inert gases. In this paper, we report a gas sensor using carbon nanotube(CNT) array aselectron emitters for the purpose of detecting these gases. Specifically, sensors werefabricated with applications of glass patterning by a sand-blast process and of anodicbonding between glass and silicon to improve the compactness of the structure and thereliability in process. The proposed sensor, based on an electrical discharge theory known asPaschen's law, worked by figuring the changes of dark discharge current and initialbreakdown voltage depending on the concentration and the identity of gases. In this work,air and Ar gases were examined and discussed.

Keywords: carbon nanotubes; gas sensor; Paschen's law; ionization.

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