Sensors 2006, 6(4), 397-404; doi:10.3390/s6040397
Article

Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell

Arshak Poghossian 1, Kerstin Schumacher 1, Joachim P. Kloock 1, Christian Rosenkranz 3, Joachim W. Schultze 3, Mattea Müller-Veggian 1 and Michael J. Schöning 1,* email
1 Aachen University of Applied Sciences, Jülich Campus, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, 52428 Jülich, Germany 2 Institute of Thin Films and Interfaces (ISG-2), Research Centre Jülich GmbH, 52425 Jülich, Germany 3 AGEF e.V.-Institute, Heinrich-Heine University, 40225 Düsseldorf, Germany
* Author to whom correspondence should be addressed.
Received: 28 July 2005 / Accepted: 4 January 2006 / Published: 7 April 2006
PDF Full-text Download PDF Full-Text [302 KB, uploaded 20 June 2008 16:51 CET]
Abstract: A wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designedcapillary electrochemical micro-droplet cell into a commercial wafer prober-station. Thedeveloped system allows the identification and selection of “good” ISFETs at the earlieststage and to avoid expensive bonding, encapsulation and packaging processes for non-functioning ISFETs and thus, to decrease costs, which are wasted for bad dies. Thedeveloped system is also feasible for wafer-level characterisation of ISFETs in terms ofsensitivity, hysteresis and response time. Additionally, the system might be also utilised forwafer-level testing of further electrochemical sensors.
Keywords: ISFET; wafer-level testing; capillary micro-droplet cell.

Article Statistics

Click here to load and display the download statistics.

Cite This Article

MDPI and ACS Style

Poghossian, A.; Schumacher, K.; Kloock, J.P.; Rosenkranz, C.; Schultze, J.W.; Müller-Veggian, M.; Schöning, M.J. Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell. Sensors 2006, 6, 397-404.

AMA Style

Poghossian A., Schumacher K., Kloock J.P., Rosenkranz C., Schultze J.W., Müller-Veggian M., Schöning M.J. Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell. Sensors. 2006; 6(4):397-404.

Chicago/Turabian Style

Poghossian, Arshak; Schumacher, Kerstin; Kloock, Joachim P.; Rosenkranz, Christian; Schultze, Joachim W.; Müller-Veggian, Mattea; Schöning, Michael J. 2006. "Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell." Sensors 6, no. 4: 397-404.

Sensors EISSN 1424-8220 Published by MDPI Publishing, Basel, Switzerland RSS E-Mail Table of Contents Alert