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Sensors 2002, 2(3), 121-126; doi:10.3390/s20300121

Multiparametric Porous Silicon Sensors

1,* , 1, 1, 2, 2, 2 and 2
1 Department of Chemistry and Physics, University of Brescia, Via Valotti 9 25133 Brescia, Italy 2 Department of Physics and INFM, University of Trento, via Sommarive 14, I-38050 Povo (Tn) Italy
* Author to whom correspondence should be addressed.
Received: 10 April 2002 / Accepted: 11 April 2002 / Published: 11 April 2002
(This article belongs to the Special Issue Nano-Porous Sensor Material)
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We investigated the possibility of using several sensing parameters from porous silicon in order to improve gas selectivity. By fabricating porous silicon optical microcavities, three independent quantities can be measured, i.e. the electrical conductance, the photoluminescence intensity, and the wavelength of the optical resonance. We monitored the change of these three parameters as a function of NO2 (0.5-5 ppm), ethanol (300-15000 ppm) and relative humidity (0-100%). Preliminary results confirm that the examined species affect the parameters in a different way, both as a relative change and as dynamic.
Keywords: Porous silicon; Optical microcavity; Gas sensor; Nitrogen dioxide Porous silicon; Optical microcavity; Gas sensor; Nitrogen dioxide
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Baratto, C.; Faglia, G.; Sberveglieri, G.; Gaburro, Z.; Pancheri, L.; Oton, C.; Pavesi, L. Multiparametric Porous Silicon Sensors. Sensors 2002, 2, 121-126.

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