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Sensors 2018, 18(2), 500; https://doi.org/10.3390/s18020500

Real-Time and Meter-Scale Absolute Distance Measurement by Frequency-Comb-Referenced Multi-Wavelength Interferometry

1
High-tech Institution of Xi’an, Xi’an 710025, China
2
College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China
*
Author to whom correspondence should be addressed.
Received: 26 November 2017 / Revised: 26 January 2018 / Accepted: 1 February 2018 / Published: 7 February 2018
(This article belongs to the Section Physical Sensors)
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Abstract

We report on a frequency-comb-referenced absolute interferometer which instantly measures long distance by integrating multi-wavelength interferometry with direct synthetic wavelength interferometry. The reported interferometer utilizes four different wavelengths, simultaneously calibrated to the frequency comb of a femtosecond laser, to implement subwavelength distance measurement, while direct synthetic wavelength interferometry is elaborately introduced by launching a fifth wavelength to extend a non-ambiguous range for meter-scale measurement. A linearity test performed comparatively with a He–Ne laser interferometer shows a residual error of less than 70.8 nm in peak-to-valley over a 3 m distance, and a 10 h distance comparison is demonstrated to gain fractional deviations of ~3 × 10−8 versus 3 m distance. Test results reveal that the presented absolute interferometer enables precise, stable, and long-term distance measurements and facilitates absolute positioning applications such as large-scale manufacturing and space missions. View Full-Text
Keywords: absolute distance measurement; frequency comb; multi-wavelength interferometry; direct synthetic wavelength interferometry; non-ambiguous range absolute distance measurement; frequency comb; multi-wavelength interferometry; direct synthetic wavelength interferometry; non-ambiguous range
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Wang, G.; Tan, L.; Yan, S. Real-Time and Meter-Scale Absolute Distance Measurement by Frequency-Comb-Referenced Multi-Wavelength Interferometry. Sensors 2018, 18, 500.

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