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Sensors 2018, 18(1), 242; doi:10.3390/s18010242

Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch

Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
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Received: 10 December 2017 / Revised: 4 January 2018 / Accepted: 13 January 2018 / Published: 16 January 2018
(This article belongs to the Section Physical Sensors)
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Abstract

A wireless and passive temperature sensor operating up to 800 °C is proposed. The sensor is based on microwave backscatter RFID (radio frequency identification) technology. A thin-film planar structure and simple working principle make the sensor easy to operate under high temperature. In this paper, the proposed high temperature sensor was designed, fabricated, and characterized. Here the 99% alumina ceramic with a dimension of 40 mm × 40 mm × 1 mm was prepared in micromechanics for fabrication of the sensor substrate. The metallization of the Au slot patch was realized in magnetron sputtering with a slot width of 2 mm and a slot length of 32 mm. The measured resonant frequency of the sensor at 25 °C is 2.31 GHz. It was concluded that the resonant frequency decreases with the increase in the temperature in range of 25–800 °C. It was shown that the average sensor sensitivity is 101.94 kHz/°C. View Full-Text
Keywords: wireless temperature sensor; microwave backscatter; slot radiation patch; RFID tags; resonant frequency wireless temperature sensor; microwave backscatter; slot radiation patch; RFID tags; resonant frequency
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Lu, F.; Wang, H.; Guo, Y.; Tan, Q.; Zhang, W.; Xiong, J. Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch. Sensors 2018, 18, 242.

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