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Sensors 2017, 17(6), 1397; doi:10.3390/s17061397

LDMOS Channel Thermometer Based on a Thermal Resistance Sensor for Balancing Temperature in Monolithic Power ICs

1
Institute of Communications Engineering, National Chiao-Tung University, Hsinchu 30010, Taiwan
2
Department of Electrical Engineering, National Dong-Hwa University, Hualien 97401, Taiwan
3
Department of Electrical Engineering, National Chiao-Tung University, Hsinchu 30010, Taiwan
*
Authors to whom correspondence should be addressed.
Received: 16 April 2017 / Revised: 8 June 2017 / Accepted: 10 June 2017 / Published: 15 June 2017
(This article belongs to the Special Issue Innovative Smart Sensors for Control Systems)
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Abstract

This paper presents a method of thermal balancing for monolithic power integrated circuits (ICs). An on-chip temperature monitoring sensor that consists of a poly resistor strip in each of multiple parallel MOSFET banks is developed. A temperature-to-frequency converter (TFC) is proposed to quantize on-chip temperature. A pulse-width-modulation (PWM) methodology is developed to balance the channel temperature based on the quantization. The modulated PWM pulses control the hottest of metal-oxide-semiconductor field-effect transistor (MOSFET) bank to reduce its power dissipation and heat generation. A test chip with eight parallel MOSFET banks is fabricated in TSMC 0.25 μm HV BCD processes, and total area is 900 × 914 μm2. The maximal temperature variation among the eight banks can reduce to 2.8 °C by the proposed thermal balancing system from 9.5 °C with 1.5 W dissipation. As a result, our proposed system improves the lifetime of a power MOSFET by 20%. View Full-Text
Keywords: monolithic power ICs; temperature sensor; oscillator; thermal balancing; power metal-oxide-semiconductor (MOS); calibration monolithic power ICs; temperature sensor; oscillator; thermal balancing; power metal-oxide-semiconductor (MOS); calibration
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Lin, T.; Ho, Y.; Su, C. LDMOS Channel Thermometer Based on a Thermal Resistance Sensor for Balancing Temperature in Monolithic Power ICs. Sensors 2017, 17, 1397.

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