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Sensors 2017, 17(6), 1163; doi:10.3390/s17061163

Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

1
ESYCOM, ESIEE-Paris, Cité Descartes BP99, 93162 Noisy-le-Grand, France
2
CEA, LIST, Diamond Sensor Laboratory, 91191 Gif-sur-Yvette, France
3
ISIPCA, 34–36 Rue du Parc de Clagny, 78000 Versailles, France
*
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 31 March 2017 / Revised: 12 May 2017 / Accepted: 12 May 2017 / Published: 24 May 2017
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in France 2016)
View Full-Text   |   Download PDF [4782 KB, uploaded 24 May 2017]   |  

Abstract

This paper reports on the development of an autonomous instrument based on an array of eight resonant microcantilevers for vapor detection. The fabricated sensors are label-free devices, allowing chemical and biological functionalization. In this work, sensors based on an array of silicon and synthetic diamond microcantilevers are sensitized with polymeric films for the detection of analytes. The main advantage of the proposed system is that sensors can be easily changed for another application or for cleaning since the developed gas cell presents removable electrical connections. We report the successful application of our electronic nose approach to detect 12 volatile organic compounds. Moreover, the response pattern of the cantilever arrays is interpreted via principal component analysis (PCA) techniques in order to identify samples. View Full-Text
Keywords: microcantilevers; electronic nose; VOC discrimination; gas sensors; sensor arrays; synthetic diamond microcantilevers; electronic nose; VOC discrimination; gas sensors; sensor arrays; synthetic diamond
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Possas-Abreu, M.; Ghassemi, F.; Rousseau, L.; Scorsone, E.; Descours, E.; Lissorgues, G. Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection. Sensors 2017, 17, 1163.

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