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Sensors 2017, 17(5), 1055; doi:10.3390/s17051055

Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection

1
CIRIMAT, Université de Toulouse, CNRS, INPT, UPS, 118 Route de Narbonne, F-31062 Toulouse Cedex 9, France
2
LAAS-CNRS, Université de Toulouse, UPS, INSA, 7 avenue du colonel Roche, F-31031 Toulouse, France
*
Author to whom correspondence should be addressed.
Academic Editors: Nicole Jaffrezic-Renault and Gaelle Lissorgues
Received: 31 March 2017 / Revised: 25 April 2017 / Accepted: 4 May 2017 / Published: 6 May 2017
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in France 2016)
View Full-Text   |   Download PDF [4223 KB, uploaded 8 May 2017]   |  

Abstract

The integration of a 50-nm-thick layer of an innovative sensitive material on microsensors has been developed based on silicon micro-hotplates. In this study, integration of ZnO:Ga via radio-frequency (RF) sputtering has been successfully combined with a low cost and reliable stencil mask technique to obtain repeatable sensing layers on top of interdigitated electrodes. The variation of the resistance of this n-type Ga-doped ZnO has been measured under sub-ppm traces (500 ppb) of acetaldehyde (C2H4O). Thanks to the microheater designed into a thin membrane, the generation of very rapid temperature variations (from room temperature to 550 °C in 25 ms) is possible, and a rapid cycled pulsed-temperature operating mode can be applied to the sensor. This approach reveals a strong improvement of sensing performances with a huge sensitivity between 10 and 1000, depending on the working pulsed-temperature level. View Full-Text
Keywords: gas sensors; ZnO:Ga; RF sputtering; stencil mask; metal-oxide microsensor; acetaldehyde; pulsed temperature gas sensors; ZnO:Ga; RF sputtering; stencil mask; metal-oxide microsensor; acetaldehyde; pulsed temperature
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Presmanes, L.; Thimont, Y.; Chapelle, A.; Blanc, F.; Talhi, C.; Bonningue, C.; Barnabé, A.; Menini, P.; Tailhades, P. Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection. Sensors 2017, 17, 1055.

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