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Sensors 2017, 17(4), 801; doi:10.3390/s17040801

SAW Sensors for Chemical Vapors and Gases

1
National Energy Technology Laboratory, Pittsburgh, PA 15236, USA
2
Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, USA
3
Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, USA
*
Authors to whom correspondence should be addressed.
Academic Editors: Jikui Luo, Weipeng Xuan and Richard Y. Q. Fu
Received: 23 February 2017 / Revised: 30 March 2017 / Accepted: 4 April 2017 / Published: 8 April 2017
(This article belongs to the Special Issue Acoustic Wave Resonator-Based Sensors)
View Full-Text   |   Download PDF [3072 KB, uploaded 21 April 2017]   |  

Abstract

Surface acoustic wave (SAW) technology provides a sensitive platform for sensing chemicals in gaseous and fluidic states with the inherent advantages of passive and wireless operation. In this review, we provide a general overview on the fundamental aspects and some major advances of Rayleigh wave-based SAW sensors in sensing chemicals in a gaseous phase. In particular, we review the progress in general understanding of the SAW chemical sensing mechanism, optimization of the sensor characteristics, and the development of the sensors operational at different conditions. Based on previous publications, we suggest some appropriate sensing approaches for particular applications and identify new opportunities and needs for additional research in this area moving into the future. View Full-Text
Keywords: acoustic waves; acoustoelectric effect; interdigital transducer; mass loading; piezoelectric effect; radiofrequency; sensing layer; viscoelasticity acoustic waves; acoustoelectric effect; interdigital transducer; mass loading; piezoelectric effect; radiofrequency; sensing layer; viscoelasticity
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Devkota, J.; Ohodnicki, P.R.; Greve, D.W. SAW Sensors for Chemical Vapors and Gases. Sensors 2017, 17, 801.

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