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Sensors 2016, 16(7), 1025; doi:10.3390/s16071025

Design of Diaphragm and Coil for Stable Performance of an Eddy Current Type Pressure Sensor

1
School of Mechanical Engineering, Pusan National University, 2, Busandaehak-ro 63 beon gil, Geumjeong-gu, Busan 46241, Korea
2
NOVASEN Co., LTD, 25, Bansong-ro 525 beon gil, Haeundae-gu, Busan 48002, Korea
3
Research Institute of Mechanical Technology, Pusan National University, 2, Busandaehak-ro 63 beon gil, Geumjeong-gu, Busan 46241, Korea
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 7 April 2016 / Revised: 21 June 2016 / Accepted: 22 June 2016 / Published: 1 July 2016
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [7164 KB, uploaded 1 July 2016]   |  

Abstract

The aim of this work was to develop an eddy current type pressure sensor and investigate its fundamental characteristics affected by the mechanical and electrical design parameters of sensor. The sensor has two key components, i.e., diaphragm and coil. On the condition that the outer diameter of sensor is 10 mm, two key parts should be designed so as to keep a good linearity and sensitivity. Experiments showed that aluminum is the best target material for eddy current detection. A round-grooved diaphragm is suggested in order to measure more precisely its deflection caused by applied pressures. The design parameters of a round-grooved diaphragm can be selected depending on the measuring requirements. A developed pressure sensor with diaphragm of t = 0.2 mm and w = 1.05 mm was verified to measure pressure up to 10 MPa with very good linearity and errors of less than 0.16%. View Full-Text
Keywords: eddy current; pressure sensor; round-groove; impedance change eddy current; pressure sensor; round-groove; impedance change
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Lee, H.R.; Lee, G.S.; Kim, H.Y.; Ahn, J.H. Design of Diaphragm and Coil for Stable Performance of an Eddy Current Type Pressure Sensor. Sensors 2016, 16, 1025.

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