Next Article in Journal
Measurement and Modeling of Narrowband Channels for Ultrasonic Underwater Communications
Next Article in Special Issue
Analysis of Forensic Casework Utilizing Infrared Spectroscopic Imaging
Previous Article in Journal
Cable Crosstalk Suppression with Two-Wire Voltage Feedback Method for Resistive Sensor Array
Previous Article in Special Issue
Tunable Microcavity-Stabilized Quantum Cascade Laser for Mid-IR High-Resolution Spectroscopy and Sensing
Article Menu

Export Article

Open AccessArticle
Sensors 2016, 16(2), 251; doi:10.3390/s16020251

Improved Sensitivity MEMS Cantilever Sensor for Terahertz Photoacoustic Spectroscopy

1
Department of Electrical and Computer Engineering, Air Force Institute of Technology, 2950 Hobson Way, Wright-Patterson AFB, Dayton, OH 45433, USA
2
Department of Physics, Wright State University, 3640 Colonel Glenn Highway, Dayton, OH 45435, USA
*
Author to whom correspondence should be addressed.
Academic Editors: Vincenzo Spagnolo and Dragan Indjin
Received: 7 December 2015 / Revised: 20 January 2016 / Accepted: 4 February 2016 / Published: 19 February 2016
(This article belongs to the Special Issue Infrared and THz Sensing and Imaging)
View Full-Text   |   Download PDF [1297 KB, uploaded 19 February 2016]   |  

Abstract

In this paper, a microelectromechanical system (MEMS) cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz) radiation induced photoacoustic (PA) response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by reducing internal beam stresses, minimizing out of plane beam curvature and optimizing beam damping. In addition, fabrication yield was improved by approximately 50% by filleting the cantilever’s anchor and free end to help reduce high stress areas that occurred during device fabrication and processing. All of the cantilever sensors were fabricated using silicon-on-insulator (SOI) wafers and tested in a custom built, low-volume, vacuum chamber. The resulting cantilever sensors exhibited improved signal to noise ratios, sensitivities and normalized noise equivalent absorption (NNEA) coefficients of approximately 4.28 × 10−10 cm−1·WHz−1/2. This reported NNEA represents approximately a 70% improvement over previously fabricated and tested SOI cantilever sensors for THz PA spectroscopy. View Full-Text
Keywords: MEMS; cantilever; terahertz; photoacoustic MEMS; cantilever; terahertz; photoacoustic
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Coutu, R.A.; Medvedev, I.R.; Petkie, D.T. Improved Sensitivity MEMS Cantilever Sensor for Terahertz Photoacoustic Spectroscopy. Sensors 2016, 16, 251.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top