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Sensors 2016, 16(10), 1660; doi:10.3390/s16101660

Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications

School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China
International Research Institute for Multidisciplinary Science, Beihang University, Beijing 100191, China
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 26 July 2016 / Revised: 25 September 2016 / Accepted: 5 October 2016 / Published: 17 October 2016
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [17692 KB, uploaded 17 October 2016]   |  


Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms were fabricated via an ultrasonic vibration mill-grinding (UVMG) method, which resulted in a small grinding force and low surface roughness. The sensor head was formed by hermetically bonding two layers of SiC using a nickel diffusion bonding method. The pressure sensor illustrated a good linearity in the range of 0.1–0.9 MPa, with a resolution of 0.27% F.S. (full scale) at room temperature. View Full-Text
Keywords: pressure sensor; silicon carbide; ultrasonic assisted machining; bonding; harsh environment pressure sensor; silicon carbide; ultrasonic assisted machining; bonding; harsh environment

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Jiang, Y.; Li, J.; Zhou, Z.; Jiang, X.; Zhang, D. Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications. Sensors 2016, 16, 1660.

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