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Sensors 2016, 16(1), 93; doi:10.3390/s16010093

A Sensitivity Enhanced MWCNT/PDMS Tactile Sensor Using Micropillars and Low Energy Ar+ Ion Beam Treatment

1
Department of Nature-Inspired Nano Convergence Systems, Korea Institute of Machinery and Materials, Daejeon 34103, Korea
2
Department of Nanobiotechnology, University of Science & Technology, Daejeon 34113, Korea
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 18 November 2015 / Revised: 28 December 2015 / Accepted: 4 January 2016 / Published: 12 January 2016
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [2475 KB, uploaded 12 January 2016]   |  

Abstract

High sensitive flexible and wearable devices which can detect delicate touches have attracted considerable attentions from researchers for various promising applications. This research was aimed at enhancing the sensitivity of a MWCNT/PDMS piezoresistive tactile sensor through modification of its surface texture in the form of micropillars on MWCNT/PDMS film and subsequent low energy Ar+ ion beam treatment of the micropillars. The introduction of straight micropillars on the MWCNT/PDMS surface increased the sensitivity under gentle touch. Low energy ion beam treatment was performed to induce a stiff layer on the exposed surface of the micropillar structured MWCNT/PDMS film. The low energy ion bombardment stabilized the electrical properties of the MWCNT/PDMS surface and tuned the curvature of micropillars according to the treatment conditions. The straight micropillars which were treated by Ar+ ion with an incident angle of 0° demonstrated the enhanced sensitivity under normal pressure and the curved micropillars which were treated with Ar+ ion with an incident angle of 60° differentiated the direction of an applied shear pressure. The ion beam treatment on micropillar structured MWCNT/PDMS tactile sensors can thus be applied to reliable sensing under gentle touch with directional discrimination. View Full-Text
Keywords: MWCNT/PDMS; piezoresistive tactile sensor; micropillar; ion beam treatment; curved pillar; directional detection MWCNT/PDMS; piezoresistive tactile sensor; micropillar; ion beam treatment; curved pillar; directional detection
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Hasan, S.A.U.; Jung, Y.; Kim, S.; Jung, C.-L.; Oh, S.; Kim, J.; Lim, H. A Sensitivity Enhanced MWCNT/PDMS Tactile Sensor Using Micropillars and Low Energy Ar+ Ion Beam Treatment. Sensors 2016, 16, 93.

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