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Sensors 2016, 16(1), 69; doi:10.3390/s16010069

Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition

Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, Xi’an Jiaotong University, Xi’an 710049, China
Department of Chemistry and 4D LABS, Simon Fraser University, Burnaby, BC V5A 1S6, Canada
Author to whom correspondence should be addressed.
Academic Editor: Alexander Star
Received: 22 November 2015 / Revised: 22 December 2015 / Accepted: 31 December 2015 / Published: 12 January 2016
(This article belongs to the Section Biosensors)
View Full-Text   |   Download PDF [4050 KB, uploaded 12 January 2016]   |  


In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing. View Full-Text
Keywords: piezoelectric diaphragm biosensor; lead-free; chemical solution deposition piezoelectric diaphragm biosensor; lead-free; chemical solution deposition

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Li, X.; Wu, X.; Shi, P.; Ye, Z.-G. Lead-Free Piezoelectric Diaphragm Biosensors Based on Micro-Machining Technology and Chemical Solution Deposition. Sensors 2016, 16, 69.

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