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Sensors 2016, 16(1), 39; doi:10.3390/s16010039

Nano-Anatase TiO2 for High Performance Optical Humidity Sensing on Chip

Photonics Research Center, University of Malaya, Kuala Lumpur 50603, Malaysia
Department of Chemistry, Faculty of Science, University of Malaya, Kuala Lumpur 50603, Malaysia
Author to whom correspondence should be addressed.
Academic Editor: Gary R. Pickrell
Received: 3 November 2015 / Revised: 8 December 2015 / Accepted: 24 December 2015 / Published: 29 December 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [2592 KB, uploaded 29 December 2015]   |  


An on-chip optical humidity sensor using Nano-anatase TiO2 coating is presented here. The coating material was prepared so that the result is in solution form, making the fabrication process quick and simple. Then, the solution was effortlessly spin-coated on an SU8 straight channel waveguide. Investigating the sensitivity and performance (response time) of the device revealed a great linearity in the wide range (35% to 98%) of relative humidity (RH). In addition, a variation of more than 14 dB in transmitted optical power was observed, with a response time of only ~0.7 s. The effect of coating concentration and UV treatment was examined on the performance and repeatability of the sensor. Interesting observations were found, and the attributed mechanisms were described. In addition, the proposed sensor was extensively compared with other state-of-the-art proposed counterparts from the literature and remarkable advantages were found. Since a high sensitivity of ~0.21 dB/%RH and high dynamic performances were demonstrated, this sensor is proposed for use in biomedical applications. View Full-Text
Keywords: humidity sensing; nano-anatase TiO2; waveguide; evanescence field; optic sensor humidity sensing; nano-anatase TiO2; waveguide; evanescence field; optic sensor

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Ghadiry, M.; Gholami, M.; Choon Kong, L.; Wu Yi, C.; Ahmad, H.; Alias, Y. Nano-Anatase TiO2 for High Performance Optical Humidity Sensing on Chip. Sensors 2016, 16, 39.

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