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Sensors 2015, 15(6), 14745-14756; doi:10.3390/s150614745

Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan
These authors contributed equally to this work.
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Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 31 March 2015 / Revised: 12 May 2015 / Accepted: 13 May 2015 / Published: 22 June 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [3413 KB, uploaded 23 June 2015]   |  

Abstract

Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively. View Full-Text
Keywords: microelectromechanical devices; electrothermal effects; silicon on insulator microelectromechanical devices; electrothermal effects; silicon on insulator
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Tsai, C.-H.; Tsai, C.-W.; Chang, H.-T.; Liu, S.-H.; Tsai, J.-C. Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type. Sensors 2015, 15, 14745-14756.

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