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Sensors 2015, 15(4), 8945-8967; doi:10.3390/s150408945

Optimization of Capacitive Acoustic Resonant Sensor Using Numerical Simulation and Design of Experiment

1
Centre Microélectronique de Provence, Ecole des Mines de Saint-Etienne, Gardanne 13541, France
2
TAGSYS RFID, 13600 La Ciotat, France
3
Aix-Marseille Université, LISA EA 4672, 13397 Marseille Cedex 20, France
*
Authors to whom correspondence should be addressed.
Academic Editor: Vittorio M.N. Passaro
Received: 29 January 2015 / Revised: 27 March 2015 / Accepted: 9 April 2015 / Published: 16 April 2015
(This article belongs to the Special Issue Acoustic Waveguide Sensors)
View Full-Text   |   Download PDF [3477 KB, uploaded 16 April 2015]   |  

Abstract

Optimization of the acoustic resonant sensor requires a clear understanding of how the output responses of the sensor are affected by the variation of different factors. During this work, output responses of a capacitive acoustic transducer, such as membrane displacement, quality factor, and capacitance variation, are considered to evaluate the sensor design. The six device parameters taken into consideration are membrane radius, backplate radius, cavity height, air gap, membrane tension, and membrane thickness. The effects of factors on the output responses of the transducer are investigated using an integrated methodology that combines numerical simulation and design of experiments (DOE). A series of numerical experiments are conducted to obtain output responses for different combinations of device parameters using finite element methods (FEM). Response surface method is used to identify the significant factors and to develop the empirical models for the output responses. Finally, these results are utilized to calculate the optimum device parameters using multi-criteria optimization with desirability function. Thereafter, the validating experiments are designed and deployed using the numerical simulation to crosscheck the responses. View Full-Text
Keywords: acoustic sensor; resonance; numerical simulation; design of experiments; response surface method; optimization acoustic sensor; resonance; numerical simulation; design of experiments; response surface method; optimization
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Haque, R.I.; Loussert, C.; Sergent, M.; Benaben, P.; Boddaert, X. Optimization of Capacitive Acoustic Resonant Sensor Using Numerical Simulation and Design of Experiment. Sensors 2015, 15, 8945-8967.

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