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Sensors 2015, 15(4), 8931-8944; doi:10.3390/s150408931

A Reliable and Simple Method for Fabricating a Poly(Dimethylsiloxane) Electrospray Ionization Chip with a Corner-Integrated Emitter

Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055, China
Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China
Authors to whom correspondence should be addressed.
Academic Editor: Kwang W. Oh
Received: 6 March 2015 / Revised: 9 April 2015 / Accepted: 10 April 2015 / Published: 16 April 2015
(This article belongs to the Special Issue On-Chip Sensors)
View Full-Text   |   Download PDF [1207 KB, uploaded 16 April 2015]   |  


Monolithically integrated emitters have been increasingly applied to microfluidic devices that are coupled to mass spectrometers (MS) as electrospray ionization sources (ESI). A new method was developed to fabricate a duplicable structure which integrated the emitter into a poly(dimethylsiloxane) chip corner. Two photoresist layers containing a raised base which guaranteed the precise integration of the electrospray tip emitter and ensured that the cutting out of the tip exerted no influence even during repeated prototyping were used to ease the operation of the process. Highly stable ESI-MS performance was obtained and the results were compared with those of a commercial fused-silica capillary source. Furthermore, chip-to-chip and run-to-run results indicated both reliability and reproducibility during repeated fabrication. These results reveal that the proposed chip can provide an ideal ion source for MS across many applications, especially with the perspective to be widely used in portable MS during on-site analysis. View Full-Text
Keywords: microfluidic chip; multi-layer soft lithography; electrospray ionization microfluidic chip; multi-layer soft lithography; electrospray ionization

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Qian, X.; Xu, J.; Yu, C.; Chen, Y.; Yu, Q.; Ni, K.; Wang, X. A Reliable and Simple Method for Fabricating a Poly(Dimethylsiloxane) Electrospray Ionization Chip with a Corner-Integrated Emitter. Sensors 2015, 15, 8931-8944.

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