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Sensors 2015, 15(4), 8919-8930; doi:10.3390/s150408919

Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing

1
College of Information Engineering, Shenzhen University, Shenzhen 518060, China
2
College of Electronic Science and Technology, Shenzhen University, Shenzhen 518060, China
3
Department of ECE, the Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong, China
*
Author to whom correspondence should be addressed.
Academic Editor: Kwang W. Oh
Received: 30 December 2014 / Revised: 9 April 2015 / Accepted: 14 April 2015 / Published: 16 April 2015
(This article belongs to the Special Issue On-Chip Sensors)
View Full-Text   |   Download PDF [2917 KB, uploaded 16 April 2015]   |  

Abstract

In this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip gas sensing and processing is enabled. Compared with all previous implementations, the proposed ZnO nanocombs feature much larger effective sensing area and exhibit ultra-high sensitivity even at the room temperature. Specifically, at room temperature, we demonstrate peak sensitivities as high as 7.22 and 8.93 for CO concentrations of 250 ppm and 500 ppm, respectively. As a result, by operating the proposed ZnO-nanocomb-based gas sensor at the room temperature, the widely adopted power consuming heating components are completely removed. This leads to not only great power saving, but also full compatibility between the gas sensor and the on-chip circuitry in term of acceptable operating temperature. In addition, the reported fast response/recovery time of ~200 s/~50 s (250 ppm CO) makes it well suited to real-life applications. View Full-Text
Keywords: room temperature; CO gas sensor; CMOS compatible; ultra-high sensitivity room temperature; CO gas sensor; CMOS compatible; ultra-high sensitivity
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Pan, X.; Zhao, X. Ultra-High Sensitivity Zinc Oxide Nanocombs for On-Chip Room Temperature Carbon Monoxide Sensing. Sensors 2015, 15, 8919-8930.

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