Next Article in Journal
Phospholipid Fatty Acids as Physiological Indicators of Paracoccus denitrificans Encapsulated in Silica Sol-Gel Hydrogels
Next Article in Special Issue
Microbial Biofilm as a Smart Material
Previous Article in Journal
A New mHealth Communication Framework for Use in Wearable WBANs and Mobile Technologies
Previous Article in Special Issue
High Resolution Switching Mode Inductance-to-Frequency Converter with Temperature Compensation
Article Menu

Export Article

Open AccessArticle
Sensors 2015, 15(2), 3409-3425; doi:10.3390/s150203409

Improving Atomic Force Microscopy Imaging by a Direct Inverse Asymmetric PI Hysteresis Model

1
State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2
University of Chinese Academy of Sciences, Beijing 100049, China
3
Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong, China
*
Authors to whom correspondence should be addressed.
Received: 18 September 2014 / Revised: 26 January 2015 / Accepted: 27 January 2015 / Published: 3 February 2015
(This article belongs to the Special Issue Smart Materials for Switchable Sensors)
View Full-Text   |   Download PDF [927 KB, uploaded 17 February 2015]   |  

Abstract

A modified Prandtl–Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM systems. Due to the nonlinearity of the piezoelectric actuator, the standard symmetric PI model cannot precisely describe the asymmetric motion of the actuator. In order to improve the accuracy of AFM scans, two series of slope parameters were introduced in the PI model to describe both the voltage-increase-loop (trace) and voltage-decrease-loop (retrace). A feedforward controller based on the DIAPI model was implemented to compensate hysteresis. Performance of the DIAPI model and the feedforward controller were validated by scanning micro-lenses and standard silicon grating using a custom-built AFM. View Full-Text
Keywords: atomic force microscope; hysteresis; piezoelectric actuator; direct inverse asymmetric PI model; feedforward control atomic force microscope; hysteresis; piezoelectric actuator; direct inverse asymmetric PI model; feedforward control
Figures

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Wang, D.; Yu, P.; Wang, F.; Chan, H.-Y.; Zhou, L.; Dong, Z.; Liu, L.; Li, W.J. Improving Atomic Force Microscopy Imaging by a Direct Inverse Asymmetric PI Hysteresis Model. Sensors 2015, 15, 3409-3425.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top