Improving Atomic Force Microscopy Imaging by a Direct Inverse Asymmetric PI Hysteresis Model
AbstractA modified Prandtl–Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM systems. Due to the nonlinearity of the piezoelectric actuator, the standard symmetric PI model cannot precisely describe the asymmetric motion of the actuator. In order to improve the accuracy of AFM scans, two series of slope parameters were introduced in the PI model to describe both the voltage-increase-loop (trace) and voltage-decrease-loop (retrace). A feedforward controller based on the DIAPI model was implemented to compensate hysteresis. Performance of the DIAPI model and the feedforward controller were validated by scanning micro-lenses and standard silicon grating using a custom-built AFM. View Full-Text
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Wang, D.; Yu, P.; Wang, F.; Chan, H.-Y.; Zhou, L.; Dong, Z.; Liu, L.; Li, W.J. Improving Atomic Force Microscopy Imaging by a Direct Inverse Asymmetric PI Hysteresis Model. Sensors 2015, 15, 3409-3425.
Wang D, Yu P, Wang F, Chan H-Y, Zhou L, Dong Z, Liu L, Li WJ. Improving Atomic Force Microscopy Imaging by a Direct Inverse Asymmetric PI Hysteresis Model. Sensors. 2015; 15(2):3409-3425.Chicago/Turabian Style
Wang, Dong; Yu, Peng; Wang, Feifei; Chan, Ho-Yin; Zhou, Lei; Dong, Zaili; Liu, Lianqing; Li, Wen J. 2015. "Improving Atomic Force Microscopy Imaging by a Direct Inverse Asymmetric PI Hysteresis Model." Sensors 15, no. 2: 3409-3425.