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Sensors 2015, 15(2), 3090-3106; doi:10.3390/s150203090

Compensation for the Variable Cyclic Error in Homodyne Laser Interferometers

Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China
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Received: 4 December 2014 / Revised: 9 January 2015 / Accepted: 27 January 2015 / Published: 30 January 2015
(This article belongs to the Section Physical Sensors)
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Abstract

This paper presents a real-time method to compensate for the variable cyclic error in a homodyne laser interferometer. The parameters describing the quadrature signals of the interferometer are estimated using simple peak value detectors. The cyclic error in the homodyne laser interferometer was then corrected through simple arithmetic calculations of the quadrature signals. A field programmable gate array was utilized for the real-time compensation of the cyclic error in a homodyne laser interferometer. The simulation and experimental results indicated that the proposed method could provide a cyclic error that was fixed without compensation down to a value under 0.6 nm in a homodyne laser interferometer. The proposed method could also reduce the time-varying cyclic error to a value under 0.6 nm in a homodyne laser interferometer, in contrast to the equivalent value of 13.3 nm for a conventional elliptical fitting method. View Full-Text
Keywords: homodyne interferometer; quadrature signal; cyclic error compensation homodyne interferometer; quadrature signal; cyclic error compensation
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Hu, P.; Zhu, J.; Guo, X.; Tan, J. Compensation for the Variable Cyclic Error in Homodyne Laser Interferometers. Sensors 2015, 15, 3090-3106.

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