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Sensors 2015, 15(2), 2538-2547; doi:10.3390/s150202538

A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

1,2,†
,
1,2,†
,
1,2
,
1,2
,
1,2
,
1,2
,
1,2
,
3
and
1,2,*
1
Institute of Microelectronics, Tsinghua University, Beijing 100084, China
2
Tsinghua National Laboratory for Information Science and Technology (TNList), Beijing 100084, China
3
Department of Biomedical Engineering, Tsinghua University, Beijing 100084, China
These authors contributed equally to this work.
*
Author to whom correspondence should be addressed.
Received: 30 October 2014 / Accepted: 22 December 2014 / Published: 23 January 2015
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Abstract

This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications. View Full-Text
Keywords: ultrasonic; flexible ultrasound transducer; ultrasound imaging; flexible device; PZT ultrasonic; flexible ultrasound transducer; ultrasound imaging; flexible device; PZT
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Wang, Z.; Xue, Q.-T.; Chen, Y.-Q.; Shu, Y.; Tian, H.; Yang, Y.; Xie, D.; Luo, J.-W.; Ren, T.-L. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT. Sensors 2015, 15, 2538-2547.

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