A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT
AbstractThis paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications. View Full-Text
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Wang, Z.; Xue, Q.-T.; Chen, Y.-Q.; Shu, Y.; Tian, H.; Yang, Y.; Xie, D.; Luo, J.-W.; Ren, T.-L. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT. Sensors 2015, 15, 2538-2547.
Wang Z, Xue Q-T, Chen Y-Q, Shu Y, Tian H, Yang Y, Xie D, Luo J-W, Ren T-L. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT. Sensors. 2015; 15(2):2538-2547.Chicago/Turabian Style
Wang, Zhe; Xue, Qing-Tang; Chen, Yuan-Quan; Shu, Yi; Tian, He; Yang, Yi; Xie, Dan; Luo, Jian-Wen; Ren, Tian-Ling. 2015. "A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT." Sensors 15, no. 2: 2538-2547.