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Sensors 2015, 15(11), 28531-28542; doi:10.3390/s151128531

High-Temperature SAW Wireless Strain Sensor with Langasite

1
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
2
China Gas Turbine Establishment, Jiangyou 621703, China
*
Author to whom correspondence should be addressed.
Academic Editor: Ha Duong Ngo
Received: 11 October 2015 / Revised: 3 November 2015 / Accepted: 4 November 2015 / Published: 11 November 2015
(This article belongs to the Special Issue Sensors for Harsh Environments)
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Abstract

Two Surface acoustic wave (SAW) resonators were fabricated on langasite substrates with Euler angle of (0°, 138.5°, 117°) and (0°, 138.5°, 27°). A dipole antenna was bonded to the prepared SAW resonator to form a wireless sensor. The characteristics of the SAW sensors were measured by wireless frequency domain interrogation methods from 20 °C to 600 °C. Different temperature behaviors of the sensors were observed. Strain sensing was achieved using a cantilever configuration. The sensors were measured under applied strain from 20 °C to 500 °C. The shift of the resonance frequency contributed merely by strain is extracted from the combined effects of temperature and strain. Both the strain factors of the two SAW sensors increase with rising ambient temperature, and the SAW sensor deposited on (0°, 138.5°, 117°) cut is more sensitive to applied strain. The measurement errors of the two sensors are also discussed. The relative errors of the two sensors are between 0.63% and 2.09%. Even at 500 °C, the hysteresis errors of the two sensors are less than 5%. View Full-Text
Keywords: langasite; SAW wireless sensor; high temperature; strain langasite; SAW wireless sensor; high temperature; strain
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Shu, L.; Peng, B.; Yang, Z.; Wang, R.; Deng, S.; Liu, X. High-Temperature SAW Wireless Strain Sensor with Langasite. Sensors 2015, 15, 28531-28542.

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