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Sensors 2015, 15(10), 26018-26038; doi:10.3390/s151026018

Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques

Centre Microélectronique de Provence (CMP), École Nationale Supérieure des Mines de Saint-Étienne, 13541 Gardanne, France
Laboratoire de Mécanique et D’Acoustique UPR7051 CNRS, 31 Chemin Josep Aiguier, 13402 Marseille, France
TAGSYS RFID, 13600 La Ciotat, France
Authors to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 10 August 2015 / Revised: 28 September 2015 / Accepted: 8 October 2015 / Published: 14 October 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [3489 KB, uploaded 14 October 2015]   |  


A capacitive acoustic resonator developed by combining three-dimensional (3D) printing and two-dimensional (2D) printed electronics technique is described. During this work, a patterned bottom structure with rigid backplate and cavity is fabricated directly by a 3D printing method, and then a direct write inkjet printing technique has been employed to print a silver conductive layer. A novel approach has been used to fabricate a diaphragm for the acoustic sensor as well, where the conductive layer is inkjet-printed on a pre-stressed thin organic film. After assembly, the resulting structure contains an electrically conductive diaphragm positioned at a distance from a fixed bottom electrode separated by a spacer. Measurements confirm that the transducer acts as capacitor. The deflection of the diaphragm in response to the incident acoustic single was observed by a laser Doppler vibrometer and the corresponding change of capacitance has been calculated, which is then compared with the numerical result. Observation confirms that the device performs as a resonator and provides adequate sensitivity and selectivity at its resonance frequency. View Full-Text
Keywords: acoustic transducer; resonator; printed electronics; inkjet printing; 3D printing acoustic transducer; resonator; printed electronics; inkjet printing; 3D printing

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Haque, R.I.; Ogam, E.; Loussert, C.; Benaben, P.; Boddaert, X. Fabrication of Capacitive Acoustic Resonators Combining 3D Printing and 2D Inkjet Printing Techniques. Sensors 2015, 15, 26018-26038.

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