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Sensors 2014, 14(9), 17089-17111; doi:10.3390/s140917089

Theoretical Prediction of Experimental Jump and Pull-In Dynamics in a MEMS Sensor

1
Department of Civil and Building Engineering and Architecture, Polytechnic University of Marche, via Brecce Bianche, 60131 Ancona, Italy
2
Faculty of Engineering, Università Degli Studi e-Campus, via Isimbardi 10, 22060 Novedrate (CO), Italy
3
Physical Sciences and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia
4
Department of Mechanical Engineering, State University of New York at Binghamton, Binghamton, NY 13902, USA
*
Author to whom correspondence should be addressed.
Received: 1 April 2014 / Revised: 5 September 2014 / Accepted: 9 September 2014 / Published: 15 September 2014
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2013)
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Abstract

The present research study deals with an electrically actuated MEMS device. An experimental investigation is performed, via frequency sweeps in a neighbourhood of the first natural frequency. Resonant behavior is explored, with special attention devoted to jump and pull-in dynamics. A theoretical single degree-of-freedom spring-mass model is derived. Classical numerical simulations are observed to properly predict the main nonlinear features. Nevertheless, some discrepancies arise, which are particularly visible in the resonant branch. They mainly concern the practical range of existence of each attractor and the final outcome after its disappearance. These differences are likely due to disturbances, which are unavoidable in practice, but have not been included in the model. To take disturbances into account, in addition to the classical local investigations, we consider the global dynamics and explore the robustness of the obtained results by performing a dynamical integrity analysis. Our aim is that of developing an applicable confident estimate of the system response. Integrity profiles and integrity charts are built to detect the parameter range where reliability is practically strong and where it becomes weak. Integrity curves exactly follow the experimental data. They inform about the practical range of actuality. We discuss the combined use of integrity charts in the engineering design. Although we refer to a particular case-study, the approach is very general. View Full-Text
Keywords: MEMS sensors; nonlinear dynamic behavior; dynamical integrity analysis; experimental validation MEMS sensors; nonlinear dynamic behavior; dynamical integrity analysis; experimental validation
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Ruzziconi, L.; Ramini, A.H.; Younis, M.I.; Lenci, S. Theoretical Prediction of Experimental Jump and Pull-In Dynamics in a MEMS Sensor. Sensors 2014, 14, 17089-17111.

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