Next Article in Journal
Previous Article in Journal
Sensors 2014, 14(3), 4416-4427; doi:10.3390/s140304416
Article

Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale

* ,
 and
Received: 11 November 2013; in revised form: 25 February 2014 / Accepted: 25 February 2014 / Published: 5 March 2014
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [475 KB, uploaded 21 June 2014]
Abstract: In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.
Keywords: unbalance; gas fluctuation; aerostatic guideway; micro-scale; identification unbalance; gas fluctuation; aerostatic guideway; micro-scale; identification
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |
EndNote


MDPI and ACS Style

Chen, D.; Bian, Y.; Fan, J. Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale. Sensors 2014, 14, 4416-4427.

AMA Style

Chen D, Bian Y, Fan J. Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale. Sensors. 2014; 14(3):4416-4427.

Chicago/Turabian Style

Chen, Dongju; Bian, Yanhua; Fan, Jinwei. 2014. "Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale." Sensors 14, no. 3: 4416-4427.



Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert