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Sensors 2014, 14(3), 4416-4427; doi:10.3390/s140304416

Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale

College of Mechanical Engineering & Applied Electronics Technology, Beijing University of Technology, Beijing 100124, China
Author to whom correspondence should be addressed.
Received: 11 November 2013 / Revised: 25 February 2014 / Accepted: 25 February 2014 / Published: 5 March 2014
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [475 KB, uploaded 21 June 2014]   |  


In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method. View Full-Text
Keywords: unbalance; gas fluctuation; aerostatic guideway; micro-scale; identification unbalance; gas fluctuation; aerostatic guideway; micro-scale; identification

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Chen, D.; Bian, Y.; Fan, J. Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale. Sensors 2014, 14, 4416-4427.

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