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Sensors 2014, 14(3), 4154-4166; doi:10.3390/s140304154
Article

A Harsh Environment-Oriented Wireless Passive Temperature Sensor Realized by LTCC Technology

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Received: 12 December 2013 / Revised: 30 January 2014 / Accepted: 14 February 2014 / Published: 3 March 2014
(This article belongs to the Section Physical Sensors)
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Abstract

To meet measurement needs in harsh environments, such as high temperature and rotating applications, a wireless passive Low Temperature Co-fired Ceramics (LTCC) temperature sensor based on ferroelectric dielectric material is presented in this paper. As a LC circuit which consists of electrically connected temperature sensitive capacitor and invariable planar spiral inductor, the sensor has its resonant frequency shift with the variation in temperature. Within near-filed coupling distance, the variation in resonant frequency of the sensor can be detected contactlessly by extracting the impedance parameters of an external antenna. Ferroelectric ceramic, which has temperature sensitive permittivity, is used as the dielectric. The fabrication process of the sensor, which differs from conventional LTCC technology, is described in detail. The sensor is tested three times from room temperature to 700 °C, and considerable repeatability and sensitivity are shown, thus the feasibility of high performance wireless passive temperature sensor realized by LTCC technology is demonstrated.
Keywords: temperature sensor; LTCC; harsh environments; ferroelectric dielectric material; wireless passive temperature sensor; LTCC; harsh environments; ferroelectric dielectric material; wireless passive
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Tan, Q.; Luo, T.; Xiong, J.; Kang, H.; Ji, X.; Zhang, Y.; Yang, M.; Wang, X.; Xue, C.; Liu, J.; Zhang, W. A Harsh Environment-Oriented Wireless Passive Temperature Sensor Realized by LTCC Technology. Sensors 2014, 14, 4154-4166.

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