Next Article in Journal
Feature Optimization for Long-Range Visual Homing in Changing Environments
Previous Article in Journal
Characterization of Antimicrobial Resistance Patterns and Detection of Virulence Genes in Campylobacter Isolates in Italy
Sensors 2014, 14(2), 3323-3341; doi:10.3390/s140203323

A Vibration-Based MEMS Piezoelectric Energy Harvester and Power Conditioning Circuit

1,2,3,* , 1,2,3
1 College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China 2 Key Laboratory for Optoelectronic Technology & Systems, Ministry of Education of China, Chongqing 400044, China 3 National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing 400044, China
* Author to whom correspondence should be addressed.
Received: 25 December 2013 / Revised: 21 January 2014 / Accepted: 21 January 2014 / Published: 19 February 2014
(This article belongs to the Section Sensor Networks)
View Full-Text   |   Download PDF [795 KB, uploaded 21 June 2014]   |   Browse Figures


This paper presents a micro-electro-mechanical system (MEMS) piezoelectric power generator array for vibration energy harvesting. A complete design flow of the vibration-based energy harvester using the finite element method (FEM) is proposed. The modal analysis is selected to calculate the resonant frequency of the harvester, and harmonic analysis is performed to investigate the influence of the geometric parameters on the output voltage. Based on simulation results, a MEMS Pb(Zr,Ti)O3 (PZT) cantilever array with an integrated large Si proof mass is designed and fabricated to improve output voltage and power. Test results show that the fabricated generator, with five cantilever beams (with unit dimensions of about 3 × 2.4 × 0.05 mm3) and an individual integrated Si mass dimension of about 8 × 12.4 × 0.5 mm3, produces a output power of 66.75 μW, or a power density of 5.19 μWmm−3g−2 with an optimal resistive load of 220 kΩ from 5 m/s2 vibration acceleration at its resonant frequency of 234.5 Hz. In view of high internal impedance characteristic of the PZT generator, an efficient autonomous power conditioning circuit, with the function of impedance matching, energy storage and voltage regulation, is then presented, finding that the efficiency of the energy storage is greatly improved and up to 64.95%. The proposed self-supplied energy generator with power conditioning circuit could provide a very promising complete power supply solution for wireless sensor node loads.
Keywords: energy harvester; PZT; MEMS; power conditioning circuit energy harvester; PZT; MEMS; power conditioning circuit
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
EndNote |
MDPI and ACS Style

Yu, H.; Zhou, J.; Deng, L.; Wen, Z. A Vibration-Based MEMS Piezoelectric Energy Harvester and Power Conditioning Circuit. Sensors 2014, 14, 3323-3341.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here


[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert