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Sensors 2014, 14(10), 19402-19440; doi:10.3390/s141019402

Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass

1
State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China
2
RIKEN Center for Advanced Photonics, Hirosawa 2-1, Wako, Saitama 351-0198, Japan
*
Authors to whom correspondence should be addressed.
Received: 15 August 2014 / Revised: 28 September 2014 / Accepted: 30 September 2014 / Published: 17 October 2014
(This article belongs to the Special Issue On-Chip Sensors)
View Full-Text   |   Download PDF [15853 KB, uploaded 17 October 2014]   |  

Abstract

Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro- and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic sensors for biochemical applications. The present paper presents a comprehensive review of recent advancements in femtosecond laser processing of glass for a variety of microfluidic sensor applications. These include 3D integration of micro-/nanofluidic, optofluidic, electrofluidic, surface-enhanced Raman-scattering devices, in addition to fabrication of devices for microfluidic bioassays and lab-on-fiber sensors. This paper describes the unique characteristics of femtosecond laser processing and the basic concepts involved in femtosecond laser direct writing. Advanced spatiotemporal beam shaping methods are also discussed. Typical examples of microfluidic sensors fabricated using femtosecond lasers are then highlighted, and their applications in chemical and biological sensing are described. Finally, a summary of the technology is given and the outlook for further developments in this field is considered. View Full-Text
Keywords: femtosecond laser; microfabrication; glass material; micro-/nanofluidics; lab-on-a-chip; optofluidics; electrofluidics; surface-enhanced Raman-scattering; lab-on-fiber femtosecond laser; microfabrication; glass material; micro-/nanofluidics; lab-on-a-chip; optofluidics; electrofluidics; surface-enhanced Raman-scattering; lab-on-fiber
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

He, F.; Liao, Y.; Lin, J.; Song, J.; Qiao, L.; Cheng, Y.; Sugioka, K. Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass. Sensors 2014, 14, 19402-19440.

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