Next Article in Journal
An Ambulatory Method of Identifying Anterior Cruciate Ligament Reconstructed Gait Patterns
Previous Article in Journal
Stretchable and Flexible High-Strain Sensors Made Using Carbon Nanotubes and Graphite Films on Natural Rubber
Sensors 2014, 14(1), 877-886; doi:10.3390/s140100877

Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

1,* , 2
1 Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic 2 Czech Metrology Institute, Brno, Okružní 31, Brno 638 00, Czech Republic
* Author to whom correspondence should be addressed.
Received: 8 November 2013 / Revised: 12 December 2013 / Accepted: 13 December 2013 / Published: 7 January 2014
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [337 KB, uploaded 21 June 2014]   |   Browse Figures


We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 × 200 × 10) µm. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.
Keywords: nanometrology; nanopositioning interferometry; AFM; nanoscale nanometrology; nanopositioning interferometry; AFM; nanoscale
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
EndNote |
MDPI and ACS Style

Lazar, J.; Klapetek, P.; Valtr, M.; Hrabina, J.; Buchta, Z.; Cip, O.; Cizek, M.; Oulehla, J.; Sery, M. Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy. Sensors 2014, 14, 877-886.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here


[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert