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Sensors 2014, 14(1), 1805-1821; doi:10.3390/s140101805
Article

Applicability of Time-Averaged Holography for Micro-Electro-Mechanical System Performing Non-Linear Oscillations

1,* , 1
,
2
 and
3
1 Department of Mathematical Research in Systems, Kaunas University of Technology, Studentu st. 50-222, Kaunas LT-51368, Lithuania 2 Faculty of Mechanical Engineering and Mechatronics, Kaunas University of Technology, Kestucio St. 27, Kaunas LT-44312, Lithuania 3 Institute for Hi-Tech Development, Faculty of Mechanical Engineering and Mechatronics, Kaunas University of Technology, Student St. 65, Kaunas LT-51368, Lithuania
* Author to whom correspondence should be addressed.
Received: 4 December 2013 / Revised: 13 January 2014 / Accepted: 13 January 2014 / Published: 21 January 2014
(This article belongs to the Section Physical Sensors)
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Abstract

Optical investigation of movable microsystem components using time-averaged holography is investigated in this paper. It is shown that even a harmonic excitation of a non-linear microsystem may result in an unpredictable chaotic motion. Analytical results between parameters of the chaotic oscillations and the formation of time-averaged fringes provide a deeper insight into computational and experimental interpretation of time-averaged MEMS holograms.
Keywords: cantilever; chaos; holography cantilever; chaos; holography
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Palevicius, P.; Ragulskis, M.; Palevicius, A.; Ostasevicius, V. Applicability of Time-Averaged Holography for Micro-Electro-Mechanical System Performing Non-Linear Oscillations. Sensors 2014, 14, 1805-1821.

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