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Sensors 2014, 14(1), 1805-1821; doi:10.3390/s140101805

Applicability of Time-Averaged Holography for Micro-Electro-Mechanical System Performing Non-Linear Oscillations

1,* , 1
Received: 4 December 2013 / Revised: 13 January 2014 / Accepted: 13 January 2014 / Published: 21 January 2014
(This article belongs to the Section Physical Sensors)
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Optical investigation of movable microsystem components using time-averaged holography is investigated in this paper. It is shown that even a harmonic excitation of a non-linear microsystem may result in an unpredictable chaotic motion. Analytical results between parameters of the chaotic oscillations and the formation of time-averaged fringes provide a deeper insight into computational and experimental interpretation of time-averaged MEMS holograms.
Keywords: cantilever; chaos; holography cantilever; chaos; holography
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Palevicius, P.; Ragulskis, M.; Palevicius, A.; Ostasevicius, V. Applicability of Time-Averaged Holography for Micro-Electro-Mechanical System Performing Non-Linear Oscillations. Sensors 2014, 14, 1805-1821.

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