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Sensors 2013, 13(8), 10550-10560; doi:10.3390/s130810550

Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope

1
Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, China
2
Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
*
Authors to whom correspondence should be addressed.
Received: 22 June 2013 / Revised: 3 August 2013 / Accepted: 9 August 2013 / Published: 14 August 2013
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2013)
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Abstract

A new robust multi-degree of freedom (multi-DOF) MEMS gyroscope is presented in this paper. The designed gyroscope has its bandwidth and amplification factor of the sense mode adjusted more easily than the previous reported multi-DOF MEMS gyroscopes. Besides, a novel spring system with very small coupling stiffness is proposed, which helps achieve a narrow bandwidth and a high amplification factor for a 2-DOF vibration system. A multi-DOF gyroscope with the proposed weak spring system is designed, and simulations indicate that when the operating frequency is set at 12.59 kHz, the flat frequency response region of the sense mode can be designed as narrow as 80 Hz, and the amplification factor of the sense mode at the operating frequency is up to 91, which not only protects the amplification factor from instability against process and temperature variations, but also sacrifices less performance. An experiment is also carried out to demonstrate the validity of the design. The multi-DOF gyroscope with the proposed weak coupling spring system is capable of achieving a good tradeoff between robustness and the performance.
Keywords: multi-DOF MEMS gyroscope; robustness; narrow bandwidth; large amplification factor multi-DOF MEMS gyroscope; robustness; narrow bandwidth; large amplification factor
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Si, C.; Han, G.; Ning, J.; Yang, F. Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope. Sensors 2013, 13, 10550-10560.

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