Sensors 2013, 13(3), 3615-3624; doi:10.3390/s130303615

A Humidity Sensing Organic-Inorganic Composite for Environmental Monitoring

1 Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, Kuala Lumpur 50603, Malaysia 2 Department of Electrical Engineering, College of Engineering, Qassim University, P.O. Box 6688 Qassim 51452, Saudi Arabia 3 Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Topi 23640, Pakistan
* Author to whom correspondence should be addressed.
Received: 20 January 2013; in revised form: 10 March 2013 / Accepted: 10 March 2013 / Published: 14 March 2013
(This article belongs to the Section Chemical Sensors)
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Abstract: In this paper, we present the effect of varying humidity levels on the electrical parameters and the multi frequency response of the electrical parameters of an organic-inorganic composite (PEPC+NiPc+Cu2O)-based humidity sensor. Silver thin films (thickness ~200 nm) were primarily deposited on plasma cleaned glass substrates by the physical vapor deposition (PVD) technique. A pair of rectangular silver electrodes was formed by patterning silver film through standard optical lithography technique. An active layer of organic-inorganic composite for humidity sensing was later spun coated to cover the separation between the silver electrodes. The electrical characterization of the sensor was performed as a function of relative humidity levels and frequency of the AC input signal. The sensor showed reversible changes in its capacitance with variations in humidity level. The maximum sensitivity ~31.6 pF/%RH at 100 Hz in capacitive mode of operation has been attained. The aim of this study was to increase the sensitivity of the previously reported humidity sensors using PEPC and NiPc, which has been successfully achieved.
Keywords: composite film; humidity sensor; physical vapor deposition; scanning electron micrograph

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MDPI and ACS Style

Ahmad, Z.; Zafar, Q.; Sulaiman, K.; Akram, R.; Karimov, K.S. A Humidity Sensing Organic-Inorganic Composite for Environmental Monitoring. Sensors 2013, 13, 3615-3624.

AMA Style

Ahmad Z, Zafar Q, Sulaiman K, Akram R, Karimov KS. A Humidity Sensing Organic-Inorganic Composite for Environmental Monitoring. Sensors. 2013; 13(3):3615-3624.

Chicago/Turabian Style

Ahmad, Zubair; Zafar, Qayyum; Sulaiman, Khaulah; Akram, Rizwan; Karimov, Khasan S. 2013. "A Humidity Sensing Organic-Inorganic Composite for Environmental Monitoring." Sensors 13, no. 3: 3615-3624.

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