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Sensors 2013, 13(2), 1998-2010; doi:10.3390/s130201998
Article

A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes

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Received: 9 December 2012; in revised form: 14 January 2013 / Accepted: 15 January 2013 / Published: 4 February 2013
(This article belongs to the Section Physical Sensors)
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Abstract: For sensors constructed by freestanding membranes, when the gap between a freestanding membrane and the substrate or between membranes is at micron scale, the effects of near-field radiative heat transfer on the sensors’ thermal performance should be considered during sensor design. The radiative heat flux is transferred from a membrane to a plane or from a membrane to a membrane. In the current study of the near-field thermal radiation, the scanning probe technology has difficulty in making a membrane separated at micron scale parallel to a plane or another membrane. A novel MEMS (micro electromechanical system) device was developed by sacrificial layer technique in this work to realize a double parallel freestanding membrane structure. Each freestanding membrane has a platinum thin-film resistor and the distance between the two membranes is 1 m. After evaluating the electrical and thermal characteristics of the lower freestanding membrane, experimental measurements of near-field radiative heat transfer between the lower membrane and the upper membrane were carried out by setting the lower membrane as a heat emitter and the upper membrane as a heat receiver. The near-field radiative heat transfer between the two membranes was validated by finding a larger-than-blackbody radiative heat transfer based on the experimental data.
Keywords: MEMS; freestanding membrane; near-field; thermal radiation MEMS; freestanding membrane; near-field; thermal radiation
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Feng, C.; Tang, Z.; Yu, J.; Sun, C. A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes. Sensors 2013, 13, 1998-2010.

AMA Style

Feng C, Tang Z, Yu J, Sun C. A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes. Sensors. 2013; 13(2):1998-2010.

Chicago/Turabian Style

Feng, Chong; Tang, Zhenan; Yu, Jun; Sun, Changyu. 2013. "A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes." Sensors 13, no. 2: 1998-2010.



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