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A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes
School of Electronic Science and Technology, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian 116023, China
* Author to whom correspondence should be addressed.
Received: 9 December 2012; in revised form: 14 January 2013 / Accepted: 15 January 2013 / Published: 4 February 2013
Abstract: For sensors constructed by freestanding membranes, when the gap between a freestanding membrane and the substrate or between membranes is at micron scale, the effects of near-field radiative heat transfer on the sensors’ thermal performance should be considered during sensor design. The radiative heat flux is transferred from a membrane to a plane or from a membrane to a membrane. In the current study of the near-field thermal radiation, the scanning probe technology has difficulty in making a membrane separated at micron scale parallel to a plane or another membrane. A novel MEMS (micro electromechanical system) device was developed by sacrificial layer technique in this work to realize a double parallel freestanding membrane structure. Each freestanding membrane has a platinum thin-film resistor and the distance between the two membranes is 1 m. After evaluating the electrical and thermal characteristics of the lower freestanding membrane, experimental measurements of near-field radiative heat transfer between the lower membrane and the upper membrane were carried out by setting the lower membrane as a heat emitter and the upper membrane as a heat receiver. The near-field radiative heat transfer between the two membranes was validated by finding a larger-than-blackbody radiative heat transfer based on the experimental data.
Keywords: MEMS; freestanding membrane; near-field; thermal radiation
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MDPI and ACS Style
Feng, C.; Tang, Z.; Yu, J.; Sun, C. A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes. Sensors 2013, 13, 1998-2010.
Feng C, Tang Z, Yu J, Sun C. A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes. Sensors. 2013; 13(2):1998-2010.
Feng, Chong; Tang, Zhenan; Yu, Jun; Sun, Changyu. 2013. "A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes." Sensors 13, no. 2: 1998-2010.