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Sensors 2013, 13(12), 16672-16681; doi:10.3390/s131216672
Article

Fabrication of a Microneedle/CNT Hierarchical Micro/Nano Surface Electrochemical Sensor and Its In-Vitro Glucose Sensing Characterization

1
,
1
,
2
 and
1,*
1 Department of Electrical Engineering, the University of Texas at Dallas, 800 W. Campbell Rd., Richardson, TX 75080, USA 2 Department of Information and Communication Engineering, Hanbat National University, 125 Dongseodaero, Yuseong-Gu, Daejeon 305-719, Korea
* Author to whom correspondence should be addressed.
Received: 18 October 2013 / Revised: 14 November 2013 / Accepted: 22 November 2013 / Published: 4 December 2013
(This article belongs to the Section Chemical Sensors)
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Abstract

We report fabrication of a microneedle-based three-electrode integrated electrochemical sensor and in-vitro characterization of this sensor for glucose sensing applications. A piece of silicon was sequentially dry and wet etched to form a 15 × 15 array of tall (approximately 380 µm) sharp silicon microneedles. Iron catalyst was deposited through a SU-8 shadow mask to form the working electrode and counter electrode. A multi-walled carbon nanotube forest was grown directly on the silicon microneedle array and platinum nano-particles were electrodeposited. Silver was deposited on the Si microneedle array through another shadow mask and chlorinated to form a Ag/AgCl reference electrode. The 3-electrode electrochemical sensor was tested for various glucose concentrations in the range of 3~20 mM in 0.01 M phosphate buffered saline (PBS) solution. The sensor’s amperometric response to the glucose concentration is linear and its sensitivity was found to be 17.73 ± 3 μA/mM-cm2. This microneedle-based sensor has a potential to be used for painless diabetes testing applications.
Keywords: microneedle; glucose sensing; nanoparticle microneedle; glucose sensing; nanoparticle
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Yoon, Y.; Lee, G.S.; Yoo, K.; Lee, J.-B. Fabrication of a Microneedle/CNT Hierarchical Micro/Nano Surface Electrochemical Sensor and Its In-Vitro Glucose Sensing Characterization. Sensors 2013, 13, 16672-16681.

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