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Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis
AbstractThe design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.
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Toffoli, V.; Carrato, S.; Lee, D.; Jeon, S.; Lazzarino, M. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis. Sensors 2013, 13, 16657-16671.View more citation formats
Toffoli V, Carrato S, Lee D, Jeon S, Lazzarino M. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis. Sensors. 2013; 13(12):16657-16671.Chicago/Turabian Style
Toffoli, Valeria; Carrato, Sergio; Lee, Dongkyu; Jeon, Sangmin; Lazzarino, Marco. 2013. "Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis." Sensors 13, no. 12: 16657-16671.
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