Next Article in Journal
Fabrication of a Microneedle/CNT Hierarchical Micro/Nano Surface Electrochemical Sensor and Its In-Vitro Glucose Sensing Characterization
Next Article in Special Issue
Integrated Cantilever-Based Flow Sensors with Tunable Sensitivity for In-Line Monitoring of Flow Fluctuations in Microfluidic Systems
Previous Article in Journal / Special Issue
A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes
Sensors 2013, 13(12), 16657-16671; doi:10.3390/s131216657
Article

Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

1,2
,
2
,
3
,
4
 and
1,*
1 IOM-CNR Laboratorio TASC, SS 14 km 163, 5, Trieste 34012, Italy 2 DIA-Università di Trieste, Via Valerio, Trieste 10-34127, Italy 3 University of Alberta, 116 St and 85 Ave, Edmonton, Alberta T6G 2R3, Canada 4 Department of Chemical Engineering, Pohang University of Science and Technology, Pohang 790-784, Korea
* Author to whom correspondence should be addressed.
Received: 30 September 2013 / Revised: 28 November 2013 / Accepted: 28 November 2013 / Published: 4 December 2013
(This article belongs to the Special Issue Nanomechanical Sensors)
View Full-Text   |   Download PDF [555 KB, uploaded 21 June 2014]   |  

Abstract

The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.
Keywords: microelectromechanical system (MEMS) resonator; mass sensing; thermogravimetric analysis (TGA); microcapsules microelectromechanical system (MEMS) resonator; mass sensing; thermogravimetric analysis (TGA); microcapsules
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
SciFeed

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
EndNote |
RIS
MDPI and ACS Style

Toffoli, V.; Carrato, S.; Lee, D.; Jeon, S.; Lazzarino, M. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis. Sensors 2013, 13, 16657-16671.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert