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Sensors 2013, 13(12), 16657-16671; doi:10.3390/s131216657
Article

Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

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Received: 30 September 2013; in revised form: 28 November 2013 / Accepted: 28 November 2013 / Published: 4 December 2013
(This article belongs to the Special Issue Nanomechanical Sensors)
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Abstract: The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.
Keywords: microelectromechanical system (MEMS) resonator; mass sensing; thermogravimetric analysis (TGA); microcapsules microelectromechanical system (MEMS) resonator; mass sensing; thermogravimetric analysis (TGA); microcapsules
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Toffoli, V.; Carrato, S.; Lee, D.; Jeon, S.; Lazzarino, M. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis. Sensors 2013, 13, 16657-16671.

AMA Style

Toffoli V, Carrato S, Lee D, Jeon S, Lazzarino M. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis. Sensors. 2013; 13(12):16657-16671.

Chicago/Turabian Style

Toffoli, Valeria; Carrato, Sergio; Lee, Dongkyu; Jeon, Sangmin; Lazzarino, Marco. 2013. "Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis." Sensors 13, no. 12: 16657-16671.


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