Next Article in Journal
Fabrication of a Microneedle/CNT Hierarchical Micro/Nano Surface Electrochemical Sensor and Its In-Vitro Glucose Sensing Characterization
Next Article in Special Issue
Integrated Cantilever-Based Flow Sensors with Tunable Sensitivity for In-Line Monitoring of Flow Fluctuations in Microfluidic Systems
Previous Article in Journal / Special Issue
A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes
Sensors 2013, 13(12), 16657-16671; doi:10.3390/s131216657

Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

1 IOM-CNR Laboratorio TASC, SS 14 km 163, 5, Trieste 34012, Italy 2 DIA-Università di Trieste, Via Valerio, Trieste 10-34127, Italy 3 University of Alberta, 116 St and 85 Ave, Edmonton, Alberta T6G 2R3, Canada 4 Department of Chemical Engineering, Pohang University of Science and Technology, Pohang 790-784, Korea
* Author to whom correspondence should be addressed.
Received: 30 September 2013 / Revised: 28 November 2013 / Accepted: 28 November 2013 / Published: 4 December 2013
(This article belongs to the Special Issue Nanomechanical Sensors)
View Full-Text   |   Download PDF [555 KB, uploaded 21 June 2014]   |   Browse Figures


The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.
Keywords: microelectromechanical system (MEMS) resonator; mass sensing; thermogravimetric analysis (TGA); microcapsules microelectromechanical system (MEMS) resonator; mass sensing; thermogravimetric analysis (TGA); microcapsules
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
MDPI and ACS Style

Toffoli, V.; Carrato, S.; Lee, D.; Jeon, S.; Lazzarino, M. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis. Sensors 2013, 13, 16657-16671.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here


Cited By

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert