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Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis
IOM-CNR Laboratorio TASC, SS 14 km 163, 5, Trieste 34012, Italy
DIA-Università di Trieste, Via Valerio, Trieste 10-34127, Italy
University of Alberta, 116 St and 85 Ave, Edmonton, Alberta T6G 2R3, Canada
Department of Chemical Engineering, Pohang University of Science and Technology, Pohang 790-784, Korea
* Author to whom correspondence should be addressed.
Received: 30 September 2013; in revised form: 28 November 2013 / Accepted: 28 November 2013 / Published: 4 December 2013
Abstract: The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.
Keywords: microelectromechanical system (MEMS) resonator; mass sensing; thermogravimetric analysis (TGA); microcapsules
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MDPI and ACS Style
Toffoli, V.; Carrato, S.; Lee, D.; Jeon, S.; Lazzarino, M. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis. Sensors 2013, 13, 16657-16671.
Toffoli V, Carrato S, Lee D, Jeon S, Lazzarino M. Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis. Sensors. 2013; 13(12):16657-16671.
Toffoli, Valeria; Carrato, Sergio; Lee, Dongkyu; Jeon, Sangmin; Lazzarino, Marco. 2013. "Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis." Sensors 13, no. 12: 16657-16671.