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A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes
Department of Electrical and Computer Engineering, McGill University, Montréal, Québec H3A 0E9, Canada
Department of Computer Science, Université du Québec à Montréal, Montréal, Québec H3C 3P8, Canada
* Author to whom correspondence should be addressed.
Received: 20 October 2013; in revised form: 27 November 2013 / Accepted: 3 December 2013 / Published: 4 December 2013
Abstract: This work introduces a novel architecture for increasing the sensitivity of bulk mode gyroscopes. It is based on adding parallel plate comb drives to the points of maximum vibration amplitude, and tuning the stiffness of the combs. This increases the drive strength and results in a significant sensitivity improvement. The architecture is targeted for technologies with ~100 nm transducer gaps in order to achieve very high performance devices. In this work, this sensitivity enhancement concept was implemented in SOIMUMPs, a commercial relatively large gap technology. Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of ~33,000, at a 10 mTorr vacuum level. Measurements using discrete electronics show a rate sensitivity of 0.31 μV/°/s, corresponding to a capacitance sensitivity of 0.43 aF/°/s/electrode, two orders of magnitude higher than a similar design without combs, fabricated in the same technology.
Keywords: MEMS; resonant gyroscopes; bulk-mode; sensitivity enhancement
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MDPI and ACS Style
Elsayed, M.Y.; Nabki, F.; El-Gamal, M.N. A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes. Sensors 2013, 13, 16641-16656.
Elsayed MY, Nabki F, El-Gamal MN. A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes. Sensors. 2013; 13(12):16641-16656.
Elsayed, Mohannad Y.; Nabki, Frederic; El-Gamal, Mourad N. 2013. "A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes." Sensors 13, no. 12: 16641-16656.