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Sensors 2013, 13(12), 16641-16656; doi:10.3390/s131216641
Article

A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes

1
, 2
 and 1,*
Received: 20 October 2013; in revised form: 27 November 2013 / Accepted: 3 December 2013 / Published: 4 December 2013
(This article belongs to the Special Issue Nanomechanical Sensors)
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Abstract: This work introduces a novel architecture for increasing the sensitivity of bulk mode gyroscopes. It is based on adding parallel plate comb drives to the points of maximum vibration amplitude, and tuning the stiffness of the combs. This increases the drive strength and results in a significant sensitivity improvement. The architecture is targeted for technologies with ~100 nm transducer gaps in order to achieve very high performance devices. In this work, this sensitivity enhancement concept was implemented in SOIMUMPs, a commercial relatively large gap technology. Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of ~33,000, at a 10 mTorr vacuum level. Measurements using discrete electronics show a rate sensitivity of 0.31 μV/°/s, corresponding to a capacitance sensitivity of 0.43 aF/°/s/electrode, two orders of magnitude higher than a similar design without combs, fabricated in the same technology.
Keywords: MEMS; resonant gyroscopes; bulk-mode; sensitivity enhancement MEMS; resonant gyroscopes; bulk-mode; sensitivity enhancement
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Elsayed, M.Y.; Nabki, F.; El-Gamal, M.N. A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes. Sensors 2013, 13, 16641-16656.

AMA Style

Elsayed MY, Nabki F, El-Gamal MN. A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes. Sensors. 2013; 13(12):16641-16656.

Chicago/Turabian Style

Elsayed, Mohannad Y.; Nabki, Frederic; El-Gamal, Mourad N. 2013. "A Novel Comb Architecture for Enhancing the Sensitivity of Bulk Mode Gyroscopes." Sensors 13, no. 12: 16641-16656.



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