Next Article in Journal
Capability for Fine Tuning of the Refractive Index Sensing Properties of Long-Period Gratings by Atomic Layer Deposited Al2O3 Overlays
Next Article in Special Issue
An Ionic-Polymer-Metallic Composite Actuator for Reconfigurable Antennas in Mobile Devices
Previous Article in Journal
A Table-Shaped Tactile Sensor for Detecting Triaxial Force on the Basis of Strain Distribution
Previous Article in Special Issue
Defect Inspection of Flip Chip Solder Bumps Using an Ultrasonic Transducer
Article Menu

Export Article

Open AccessArticle
Sensors 2013, 13(12), 16360-16371; doi:10.3390/s131216360

Instability of Contact Resistance in MEMS and NEMS DC Switches under Low Force: the Role of Alien Films on the Contact Surface

1
NOVITAS, Nanoelectronics Centre of Excellence, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore
2
Temasek Laboratories @ Nanyang Technological University (NTU), 50 Nanyang Drive, Research Techno Plaza, Singapore 637553, Singapore
*
Author to whom correspondence should be addressed.
Received: 30 September 2013 / Revised: 21 November 2013 / Accepted: 22 November 2013 / Published: 28 November 2013
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2013)
View Full-Text   |   Download PDF [1049 KB, uploaded 21 June 2014]   |  

Abstract

The metal contact is one of the most crucial parts in ohmic-contact microelectromechanical (MEMS) switches, as it determines the device performance and reliability. It has been observed that there is contact instability when the contact force is below a threshold value (minimum contact force). However, there has been very limited knowledge so far about the unstable electrical contact behavior under low contact force. In this work, the instability of Au-Au micro/nano-contact behavior during the initial stage of contact formation is comprehensively investigated for the first time. It has been found that the alien film on the contact surface plays a critical role in determining the contact behavior at the initial contact stage under low contact force. A strong correlation between contact resistance fluctuation at the initial contact stage and the presence of a hydrocarbon alien film on the contact surface is revealed. The enhancement of contact instability due to the alien film can be explained within a framework of trap-assisted tunneling. View Full-Text
Keywords: MEMS; NEMS; contact instability; alien film; XPS; trap-assisted tunneling MEMS; NEMS; contact instability; alien film; XPS; trap-assisted tunneling
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Qiu, H.; Wang, H.; Ke, F. Instability of Contact Resistance in MEMS and NEMS DC Switches under Low Force: the Role of Alien Films on the Contact Surface. Sensors 2013, 13, 16360-16371.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top