Sensors 2013, 13(1), 550-564; doi:10.3390/s130100550
Article

Lamb Waves Propagation along 3C-SiC/AlN Membranes for Application in Temperature-Compensated, High-Sensitivity Gravimetric Sensors

1,* email, 2email and 3email
Received: 28 October 2012; in revised form: 14 December 2012 / Accepted: 19 December 2012 / Published: 2 January 2013
(This article belongs to the Special Issue Last Trends in Acoustic Sensing)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: The propagation of the fundamental quasi-symmetric Lamb mode S0 travelling along 3C-SiC/c-AlN composite plates is theoretically studied with respect to the AlN and SiC film thickness, the acoustic wave propagation direction and the electrical boundary conditions. The temperature effects on the phase velocity have been considered for four AlN/SiC-based electroacoustic coupling configurations, specifically addressing the design of temperature-compensated, enhanced-coupling, GHz-range electroacoustic devices. The gravimetric sensitivity and resolution of the four temperature-stable SiC/AlN composite structures are theoretically investigated with respect to both the AlN and SiC sensing surface. The SiC/AlN-based sensor performances are compared to those of surface acoustic waves and Lamb S0 mode mass sensors implemented on bulk conventional piezoelectric materials and on thin suspended membranes.
Keywords: AlN; SiC; suspended membranes; S0 Lamb mode; thermal stability; sensors
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MDPI and ACS Style

Caliendo, C.; D'Amico, A.; Lo Castro, F. Lamb Waves Propagation along 3C-SiC/AlN Membranes for Application in Temperature-Compensated, High-Sensitivity Gravimetric Sensors. Sensors 2013, 13, 550-564.

AMA Style

Caliendo C, D'Amico A, Lo Castro F. Lamb Waves Propagation along 3C-SiC/AlN Membranes for Application in Temperature-Compensated, High-Sensitivity Gravimetric Sensors. Sensors. 2013; 13(1):550-564.

Chicago/Turabian Style

Caliendo, Cinzia; D'Amico, Arnaldo; Lo Castro, Fabio. 2013. "Lamb Waves Propagation along 3C-SiC/AlN Membranes for Application in Temperature-Compensated, High-Sensitivity Gravimetric Sensors." Sensors 13, no. 1: 550-564.

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