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Sensors 2013, 13(1), 550-564; doi:10.3390/s130100550

Lamb Waves Propagation along 3C-SiC/AlN Membranes for Application in Temperature-Compensated, High-Sensitivity Gravimetric Sensors

1
Istituto dei Sistemi Complessi, ISC-CNR, Via Salaria Km. 29.300, Monterotondo Scalo, 00015 Roma, Italy
2
Dipartimento di Ingegneria Elettronica, Università di Tor Vergata, Via del Politecnico 1, 00133 Roma, Italy
3
Istituto di Acustica e Sensoristica "Orso Mario Corbino", IDASC-CNR, Via del Fosso del Cavaliere 100, 00133 Roma, Italy
*
Author to whom correspondence should be addressed.
Received: 28 October 2012 / Revised: 14 December 2012 / Accepted: 19 December 2012 / Published: 2 January 2013
(This article belongs to the Special Issue Last Trends in Acoustic Sensing)
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Abstract

The propagation of the fundamental quasi-symmetric Lamb mode S0 travelling along 3C-SiC/c-AlN composite plates is theoretically studied with respect to the AlN and SiC film thickness, the acoustic wave propagation direction and the electrical boundary conditions. The temperature effects on the phase velocity have been considered for four AlN/SiC-based electroacoustic coupling configurations, specifically addressing the design of temperature-compensated, enhanced-coupling, GHz-range electroacoustic devices. The gravimetric sensitivity and resolution of the four temperature-stable SiC/AlN composite structures are theoretically investigated with respect to both the AlN and SiC sensing surface. The SiC/AlN-based sensor performances are compared to those of surface acoustic waves and Lamb S0 mode mass sensors implemented on bulk conventional piezoelectric materials and on thin suspended membranes.
Keywords: AlN; SiC; suspended membranes; S0 Lamb mode; thermal stability; sensors AlN; SiC; suspended membranes; S0 Lamb mode; thermal stability; sensors
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Caliendo, C.; D'Amico, A.; Lo Castro, F. Lamb Waves Propagation along 3C-SiC/AlN Membranes for Application in Temperature-Compensated, High-Sensitivity Gravimetric Sensors. Sensors 2013, 13, 550-564.

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