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Journal: Sensors, 2013
Volume: 13
Page(s): 1085-1101
Article:
Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module
Ni, Z.; Yang, C.; Xu, D.; Zhou, H.; Zhou, W.; Li, T.; Xiong, B.; Li, X.
http://www.mdpi.com/1424-8220/13/1/1085
