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Sensors 2012, 12(9), 12208-12219; doi:10.3390/s120912208

An Integrated Laser-Induced Piezoelectric/Differential Confocal Surface Acoustic Wave System for Measurement of Thin Film Young’s Modulus

State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China
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Received: 13 June 2012 / Revised: 16 August 2012 / Accepted: 21 August 2012 / Published: 5 September 2012
(This article belongs to the Section Physical Sensors)
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Abstract

The present paper presents the design and development results of a system setup for measuring Young’s modulus of thin films by laser-induced surface acoustic waves based on the integration of two detection methods, namely, piezoelectric transducer detection and differential confocal detection, which may be used for conducting consecutive or simultaneous measurements. After demonstrating the capabilities of each detection approach, it is shown how, depending on a wider range of applications, sample materials and measurement environments, the developed integrated system inherits and harnesses the main characteristics of its detection channels, resulting in an more practical and flexible equipment for determining Young’s modulus than traditional nanoindentation equipment, and also suitable for cross-validation purposes.
Keywords: Young’s modulus; laser-induced surface acoustic waves; piezoelectric; differential confocal Young’s modulus; laser-induced surface acoustic waves; piezoelectric; differential confocal
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Yang, F.; Dorantes-Gonzalez, D.J.; Chen, K.; Lu, Z.; Jin, B.; Li, Y.; Chen, Z.; Hu, X. An Integrated Laser-Induced Piezoelectric/Differential Confocal Surface Acoustic Wave System for Measurement of Thin Film Young’s Modulus. Sensors 2012, 12, 12208-12219.

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