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Sensors 2012, 12(8), 10034-10041; doi:10.3390/s120810034
Article

Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors

1
,
1
,
1
,
2
 and
1,*
1 Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan 2 State Key Laboratory of Mechanical System & Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, China
* Author to whom correspondence should be addressed.
Received: 1 July 2012 / Revised: 17 July 2012 / Accepted: 17 July 2012 / Published: 25 July 2012
(This article belongs to the Section Physical Sensors)
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Abstract

This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.
Keywords: carbon microcoils; flexible sensor; chemical vapor deposition carbon microcoils; flexible sensor; chemical vapor deposition
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Su, C.-C.; Li, C.-H.; Chang, N.-K.; Gao, F.; Chang, S.-H. Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors. Sensors 2012, 12, 10034-10041.

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