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Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors
Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
State Key Laboratory of Mechanical System & Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, China
* Author to whom correspondence should be addressed.
Received: 1 July 2012; in revised form: 17 July 2012 / Accepted: 17 July 2012 / Published: 25 July 2012
Abstract: This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.
Keywords: carbon microcoils; flexible sensor; chemical vapor deposition
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Cite This Article
MDPI and ACS Style
Su, C.-C.; Li, C.-H.; Chang, N.-K.; Gao, F.; Chang, S.-H. Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors. Sensors 2012, 12, 10034-10041.
Su C-C, Li C-H, Chang N-K, Gao F, Chang S-H. Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors. Sensors. 2012; 12(8):10034-10041.
Su, Chih-Chung; Li, Chen-Hung; Chang, Neng-Kai; Gao, Feng; Chang, Shuo-Hung. 2012. "Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors." Sensors 12, no. 8: 10034-10041.