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Sensors 2012, 12(8), 10034-10041; doi:10.3390/s120810034
Article

Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors

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Received: 1 July 2012; in revised form: 17 July 2012 / Accepted: 17 July 2012 / Published: 25 July 2012
(This article belongs to the Section Physical Sensors)
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Abstract: This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.
Keywords: carbon microcoils; flexible sensor; chemical vapor deposition carbon microcoils; flexible sensor; chemical vapor deposition
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Su, C.-C.; Li, C.-H.; Chang, N.-K.; Gao, F.; Chang, S.-H. Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors. Sensors 2012, 12, 10034-10041.

AMA Style

Su C-C, Li C-H, Chang N-K, Gao F, Chang S-H. Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors. Sensors. 2012; 12(8):10034-10041.

Chicago/Turabian Style

Su, Chih-Chung; Li, Chen-Hung; Chang, Neng-Kai; Gao, Feng; Chang, Shuo-Hung. 2012. "Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors." Sensors 12, no. 8: 10034-10041.



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