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Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
* Author to whom correspondence should be addressed.
Received: 17 May 2012; in revised form: 12 June 2012 / Accepted: 12 June 2012 / Published: 25 June 2012
Abstract: In this paper, a fast automatic precision approaching system is developed for electrochemical nanofabrication using visual and force-displacement sensing. Before the substrate is fabricated, the template should approach the substrate accurately to establish the initial gap between the template and substrate. During the approaching process, the template is first quickly moved towards the substrate by the stepping motor until a specified gap is detected by the visual feedback. Then, the successive approach using the switch of macro-micro motion with a force-displacement sensing module is triggered to make the template contact with the substrate to nanometre accuracy. The contact force is measured by the force-displacement sensing module which employs the high-resolution capacitive displacement sensor and flexure compliant mechanism. The high sensitivity of this capacitive displacement sensor ensures high accuracy of the template-substrate contact. The experimental results show that the template can reach the substrate accurately and smoothly, which verifies the effectiveness of the proposed approaching system with the visual and the force-displacement sensing modules.
Keywords: approaching; contact detection; displacement-force sensing module; flexure mechanism; visual sensing module
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Cite This Article
MDPI and ACS Style
Lai, L.-J.; Zhou, S.-Y.; Gu, G.-Y.; Zhu, L.-M. Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing. Sensors 2012, 12, 8465-8476.
Lai L-J, Zhou S-Y, Gu G-Y, Zhu L-M. Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing. Sensors. 2012; 12(7):8465-8476.
Lai, Lei-Jie; Zhou, Shi-Yu; Gu, Guo-Ying; Zhu, Li-Min. 2012. "Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing." Sensors 12, no. 7: 8465-8476.