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Sensors 2012, 12(4), 4051-4064; doi:10.3390/s120404051

A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements

*  and
State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an, Shaanxi 710049, China
* Author to whom correspondence should be addressed.
Received: 9 February 2012 / Revised: 22 February 2012 / Accepted: 22 February 2012 / Published: 27 March 2012
(This article belongs to the Section Physical Sensors)
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An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sensor and a temperature sensor. The integrated multifunction micro-sensor is fabricated on silicon wafers by micromachining technology. Different doping doses of boron ion, placement and structure of resistors are tested for the force sensor, pressure sensor and temperature sensor to minimize the cross interference and optimize the properties. A glass optical fiber, with a ladder structure and sharp tip etched by buffer oxide etch solution, is glued on the micro-force sensor chip as the tactile probe. Experimental results show that the minimum force that can be detected by the force sensor is 300 nN; the lateral sensitivity of the force sensor is 0.4582 mV/μN; the probe length is linearly proportional to sensitivity of the micro-force sensor in lateral; the sensitivity of the pressure sensor is 0.11 mv/KPa; the sensitivity of the temperature sensor is 5.836 × 10−3 KΩ/°C. Thus it is a cost-effective method to fabricate integrated multifunction micro-sensors with different measurement ranges that could be used in many fields.
Keywords: integrated sensor; micro-force; pressure; temperature; glass optical fiber probe integrated sensor; micro-force; pressure; temperature; glass optical fiber probe
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Wang, W.; Zhao, Y.; Qin, Y. A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements. Sensors 2012, 12, 4051-4064.

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