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Sensors 2012, 12(3), 3269-3280; doi:10.3390/s120303269
Article

Design and Fabrication of Single-Walled Carbon Nanonet Flexible Strain Sensors

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Received: 21 January 2012 / Revised: 28 February 2012 / Accepted: 29 February 2012 / Published: 7 March 2012
(This article belongs to the Section Physical Sensors)
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Abstract

This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.
Keywords: Parylene-C; single-walled carbon nanonets; strain sensor Parylene-C; single-walled carbon nanonets; strain sensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Huang, Y.-T.; Huang, S.-C.; Hsu, C.-C.; Chao, R.-M.; Vu, T.K. Design and Fabrication of Single-Walled Carbon Nanonet Flexible Strain Sensors. Sensors 2012, 12, 3269-3280.

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