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Sensors 2012, 12(3), 2582-2597; doi:10.3390/s120302582

Integrating Metal-Oxide-Decorated CNT Networks with a CMOS Readout in a Gas Sensor

1
Department of Electrical Engineering, Seoul National University, Seoul, 151-744, Korea
2
Department of Materials Science and Engineering and Research Institute of Advanced Materials, Seoul National University, Seoul, 151-744, Korea
3
Department of Electrical and Computer Engineering, Swanson School of Engineering, University of Pittsburgh, Pittsburgh, PA 15261, USA
*
Author to whom correspondence should be addressed.
Received: 17 January 2012 / Revised: 14 February 2012 / Accepted: 15 February 2012 / Published: 27 February 2012
(This article belongs to the Special Issue Sensing at the Nano-Scale: Chemical and Bio-Sensing)
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Abstract

We have implemented a tin-oxide-decorated carbon nanotube (CNT) network gas sensor system on a single die. We have also demonstrated the deposition of metallic tin on the CNT network, its subsequent oxidation in air, and the improvement of the lifetime of the sensors. The fabricated array of CNT sensors contains 128 sensor cells for added redundancy and increased accuracy. The read-out integrated circuit (ROIC) was combined with coarse and fine time-to-digital converters to extend its resolution in a power-efficient way. The ROIC is fabricated using a 0.35 µm CMOS process, and the whole sensor system consumes 30 mA at 5 V. The sensor system was successfully tested in the detection of ammonia gas at elevated temperatures.
Keywords: carbon nanotube (CNT); read-out integrated circuit; single die; metal decoration carbon nanotube (CNT); read-out integrated circuit; single die; metal decoration
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Lee, H.; Lee, S.; Kim, D.-H.; Perello, D.; Park, Y.J.; Hong, S.-H.; Yun, M.; Kim, S. Integrating Metal-Oxide-Decorated CNT Networks with a CMOS Readout in a Gas Sensor. Sensors 2012, 12, 2582-2597.

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