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Integrating Metal-Oxide-Decorated CNT Networks with a CMOS Readout in a Gas Sensor
Department of Electrical Engineering, Seoul National University, Seoul, 151-744, Korea
Department of Materials Science and Engineering and Research Institute of Advanced Materials, Seoul National University, Seoul, 151-744, Korea
Department of Electrical and Computer Engineering, Swanson School of Engineering, University of Pittsburgh, Pittsburgh, PA 15261, USA
* Author to whom correspondence should be addressed.
Received: 17 January 2012; in revised form: 14 February 2012 / Accepted: 15 February 2012 / Published: 27 February 2012
Abstract: We have implemented a tin-oxide-decorated carbon nanotube (CNT) network gas sensor system on a single die. We have also demonstrated the deposition of metallic tin on the CNT network, its subsequent oxidation in air, and the improvement of the lifetime of the sensors. The fabricated array of CNT sensors contains 128 sensor cells for added redundancy and increased accuracy. The read-out integrated circuit (ROIC) was combined with coarse and fine time-to-digital converters to extend its resolution in a power-efficient way. The ROIC is fabricated using a 0.35 µm CMOS process, and the whole sensor system consumes 30 mA at 5 V. The sensor system was successfully tested in the detection of ammonia gas at elevated temperatures.
Keywords: carbon nanotube (CNT); read-out integrated circuit; single die; metal decoration
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MDPI and ACS Style
Lee, H.; Lee, S.; Kim, D.-H.; Perello, D.; Park, Y.J.; Hong, S.-H.; Yun, M.; Kim, S. Integrating Metal-Oxide-Decorated CNT Networks with a CMOS Readout in a Gas Sensor. Sensors 2012, 12, 2582-2597.
Lee H, Lee S, Kim D-H, Perello D, Park YJ, Hong S-H, Yun M, Kim S. Integrating Metal-Oxide-Decorated CNT Networks with a CMOS Readout in a Gas Sensor. Sensors. 2012; 12(3):2582-2597.
Lee, Hyunjoong; Lee, Sanghoon; Kim, Dai-Hong; Perello, David; Park, Young June; Hong, Seong-Hyeon; Yun, Minhee; Kim, Suhwan. 2012. "Integrating Metal-Oxide-Decorated CNT Networks with a CMOS Readout in a Gas Sensor." Sensors 12, no. 3: 2582-2597.