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• Durrani, S
• Al-Kuhaili, M
• Bakhtiari, I
• Haider, M
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• Al-Kuhaili, M
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• Haider, M
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• Al-Kuhaili, M
• Bakhtiari, I
• Haider, M

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Sensors 2012, 12(3), 2598-2609; doi:10.3390/s120302598

Article

Investigation of the Carbon Monoxide Gas Sensing Characteristics of Tin Oxide Mixed Cerium Oxide Thin Films

Sardar M. A. Durrani* , Mohammad F. Al-Kuhaili, Imran A. Bakhtiari and Muhammad B. Haider

Physics Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia

* Author to whom correspondence should be addressed.

Received: 6 January 2012; in revised form: 11 February 2012 / Accepted: 16 February 2012 / Published: 27 February 2012

(This article belongs to the Special Issue Sensing at the Nano-Scale: Chemical and Bio-Sensing)

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Abstract: Thin films of tin oxide mixed cerium oxide were grown on unheated substrates by physical vapor deposition. The films were annealed in air at 500 °C for two hours, and were characterized using X-ray photoelectron spectroscopy, atomic force microscopy and optical spectrophotometry. X-ray photoelectron spectroscopy and atomic force microscopy results reveal that the films were highly porous and porosity of our films was found to be in the range of 11.6–21.7%. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. We found that 430 °C was the optimum operating temperature for sensing CO gas at concentrations as low as 5 ppm. Our sensors exhibited fast response and recovery times of 26 s and 30 s, respectively.

Keywords: thin film; AFM; XPS; CeO₂; SnO₂; CO sensor; semiconductor gas sensor

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