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Sensors 2012, 12(3), 2436-2455; doi:10.3390/s120302436
Article

Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing

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Received: 18 January 2012; in revised form: 9 February 2012 / Accepted: 20 February 2012 / Published: 23 February 2012
(This article belongs to the Special Issue Sensing at the Nano-Scale: Chemical and Bio-Sensing)
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Abstract: Slot waveguides are becoming more and more attractive optical components, especially for chemical and bio-chemical sensing. In this paper an accurate analysis of slot waveguide fabrication tolerances is carried out, in order to find optimum design criteria for either homogeneous or absorption sensing mechanisms, in cases of low and high aspect ratio slot waveguides. In particular, we have focused on Silicon On Insulator (SOI) technology, representing the most popular technology for this kind of devices, simultaneously achieving high integration capabilities, small dimensions and low cost. An accurate analysis of single mode behavior for high aspect ratio slot waveguide has been also performed, in order to provide geometric limits for waveguide design purposes. Finally, the problem of coupling into a slot waveguide is addressed and a very compact and efficient slot coupler is proposed, whose geometry has been optimized to give a strip-slot-strip coupling efficiency close to 100%.
Keywords: slot waveguides; homogeneous optical sensing; slot couplers slot waveguides; homogeneous optical sensing; slot couplers
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Passaro, V.M.N.; La Notte, M. Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing. Sensors 2012, 12, 2436-2455.

AMA Style

Passaro VMN, La Notte M. Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing. Sensors. 2012; 12(3):2436-2455.

Chicago/Turabian Style

Passaro, Vittorio M. N.; La Notte, Mario. 2012. "Optimizing SOI Slot Waveguide Fabrication Tolerances and Strip-Slot Coupling for Very Efficient Optical Sensing." Sensors 12, no. 3: 2436-2455.


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